In:
Applied Physics Letters, AIP Publishing, Vol. 53, No. 17 ( 1988-10-24), p. 1591-1592
Abstract:
Impurity-free, polycrystalline films of platinum have been grown by the decomposition of cyclopentadienyl platinum trimethyl, CpPtMe3, in hydrogen and a noble gas over silicon or glass substrates heated to 180 °C. The films contain less than 1 at. % of oxygen and carbon, and no other detectable impurities, as measured by x-ray photoelectron and Auger spectroscopies after argon ion sputtering. Sheet resistivities are 50% greater than sputter-deposited platinum.
Type of Medium:
Online Resource
ISSN:
0003-6951
,
1077-3118
Language:
English
Publisher:
AIP Publishing
Publication Date:
1988
detail.hit.zdb_id:
211245-0
detail.hit.zdb_id:
1469436-0
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