In:
Applied Physics Letters, AIP Publishing, Vol. 58, No. 1 ( 1991-01-07), p. 36-38
Abstract:
Epitaxial thin films of lead titanate(PbTiO3) and lanthanium-modified lead titanate [(Pb, La)TiO3] have been successfully grown on (0001) sapphire substrates for the first time by the recently developed multi-ion-beam reactive cosputtering (MIBRECS) technique. The deposition processes and the thin-film analyses studied by x-ray diffraction (XRD), electron probe x-ray microanalyzer (EPMA), and reflection high-energy electron diffraction (RHEED) are reported. The experiments show that the multi-ion-beam reactive cosputtering process is very suitable for deposition of multicomponent oxide thin films with high reproducibility.
Type of Medium:
Online Resource
ISSN:
0003-6951
,
1077-3118
Language:
English
Publisher:
AIP Publishing
Publication Date:
1991
detail.hit.zdb_id:
211245-0
detail.hit.zdb_id:
1469436-0
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