In:
Journal of Applied Physics, AIP Publishing, Vol. 76, No. 4 ( 1994-08-15), p. 2104-2108
Abstract:
600–1200 keV Xe+ were implanted into KTiOPO4 (potassium titanyl phosphate) in increments of 100 keV. The depth distributions of implanted Xe+ in KTiOPO4 were measured by Rutherford backscattering. The effects of channeling, temperature, and dose on the depth distribution were briefly investigated. All range distributions were nearly Gaussian. The mean projected range and range straggling obtained were compared with the TRIM’91 code, projected range algorithm (PRAL) and Wang and Shi’s (WS) calculation procedure based on Biersack’s angular diffusion model. The results show that TRIM’91 systematically underestimates the projected range by approximately 25%, PRAL underestimates the range by approximately 28%, and WS underestimates the range by approximately 7%. All calculate the underestimated range straggling by approximately a factor of two.
Type of Medium:
Online Resource
ISSN:
0021-8979
,
1089-7550
Language:
English
Publisher:
AIP Publishing
Publication Date:
1994
detail.hit.zdb_id:
220641-9
detail.hit.zdb_id:
3112-4
detail.hit.zdb_id:
1476463-5
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