In:
Journal of Applied Physics, AIP Publishing, Vol. 70, No. 11 ( 1991-12-01), p. 7078-7084
Abstract:
By using a newly designed collimated plasma beam reactor, plasma-enhanced chemical vapor deposition from BCl3+NH3+H2+Ar with the surface irradiated by a 193-nm excimer laser at a pressure of 2.8 Torr and substrate temperatures of 500–900 °C yielded BN films with the following texture as revealed by transmission electron diffractometry (TED), transmission electron microscopy, scanning electron microscopy, and Fourier-transformed infrared spectroscopy: (1) a thin-film part which consists of 10-nm-sized crystallites with a sp2-bonded structure grown on the substrate, namely, a sp2 100 Å layer; (2) polycrystalline parts with cBN or wBN structure, depending on the condition, embedded in a sp2 100 Å layer; (3) crystallites, though found infrequently, grown to be much larger than the sp2 100 Å layer thickness. The TED pattern of the polycrystalline wBN was particularly in agreement with the standard data.
Type of Medium:
Online Resource
ISSN:
0021-8979
,
1089-7550
Language:
English
Publisher:
AIP Publishing
Publication Date:
1991
detail.hit.zdb_id:
220641-9
detail.hit.zdb_id:
3112-4
detail.hit.zdb_id:
1476463-5
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