In:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, American Vacuum Society, Vol. 8, No. 3 ( 1990-05), p. 2931-2938
Type of Medium:
Online Resource
ISSN:
0734-2101
,
1520-8559
Language:
English
Publisher:
American Vacuum Society
Publication Date:
1990
detail.hit.zdb_id:
1475424-1
detail.hit.zdb_id:
797704-9
Permalink