In:
Materia Japan, Japan Institute of Metals, Vol. 33, No. 9 ( 1994), p. 1168-1177
Type of Medium:
Online Resource
ISSN:
1340-2625
,
1884-5843
Uniform Title:
気相プロセスによる立方晶窒化ほう素薄膜の堆積
DOI:
10.2320/materia.33.1168
Language:
Japanese
,
Japanese
Publisher:
Japan Institute of Metals
Publication Date:
1994
detail.hit.zdb_id:
2907148-3
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