In:
Proceedings, annual meeting, Electron Microscopy Society of America, Cambridge University Press (CUP), Vol. 50, No. 2 ( 1992-08), p. 1294-1295
Abstract:
Calculations of spatial resolution in scanning electron microscopy are typically based on estimates of the beam size from considerations of the electron optics. The gaussian beam diameter, d g , which is determined from the brightness equation, the contributions of the aberrations (spherical, d S and chromatic, d C ), and aperture diffraction (d D ) are added in quadrature to give the diameter of the focused probe, d p : (1) This formula can predict the size of the unscattered probe outside of the specimen but to predict image resolution, it is necessary to include a description of the beam interaction with the target. Monte Carlo electron trajectory simulation provides a good description of the complex, multiple scattering situation that exists and the distribution of signals emitted, but the simulation is too slow to be used for on-line calculations, except for a few laboratories with direct access to a parallel-processing computer environment. Monte Carlo studies show that the distribution of emitted signals is dominated by the scattering processes and not by the beam size, at least for high resolution conditions.
Type of Medium:
Online Resource
ISSN:
0424-8201
,
2690-1315
DOI:
10.1017/S0424820100131103
Language:
English
Publisher:
Cambridge University Press (CUP)
Publication Date:
1992
SSG:
11
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