In:
Journal of Applied Physics, AIP Publishing, Vol. 73, No. 11 ( 1993-06-01), p. 7222-7224
Abstract:
150 keV Xe ions were implanted in potassium titanyl phosphate (KTP) at different angles of 0°, 45°, 60°, and 75°. The lateral straggling of Xe ions in KTP was investigated by normal and oblique incidence Rutherford backscattering of 2.1 MeV He ions. The result extracted is compared with the Monte Carlo code TRIM’89. The lateral straggling is seemed to be in a good agreement with TRIM’89 simulation within experimental error.
Type of Medium:
Online Resource
ISSN:
0021-8979
,
1089-7550
Language:
English
Publisher:
AIP Publishing
Publication Date:
1993
detail.hit.zdb_id:
220641-9
detail.hit.zdb_id:
3112-4
detail.hit.zdb_id:
1476463-5
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