In:
Proceedings, annual meeting, Electron Microscopy Society of America, Cambridge University Press (CUP), Vol. 48, No. 4 ( 1990-08), p. 706-707
Abstract:
Barium titanate (BaTiO 3 ) may be used in a number of thin-film applications in electronic and optoelectronic devices. For these devices the formation of epitactic films of the correct stoichiometry and phase is essential. In particular, the tetragonal form of BaTiO 3 , which is stable at room temperature, exhibits ferro-, pyro- and piezoelectric properties. It is desirable to form films of the tetragonal phase directly and thus to avoid formation of either amorphous or polycrystalline material or to form material of the non-ferroelectric cubic phase. Recently two techniques, pulsed-laser ablation and reactive evaporation, have been used to form BaTiO 3 thin-films. In the present study BaTiO 3 thin-films have been formed using the pulsed-laser ablation technique. Pulsed-laser ablation is now widely used to produce thin-films of the high temperature superconductors and has many advantages over other techniques, in particular the formation of films which maintain the stoichiometry of the target material and by controlling the processing conditions the formation of films having defined crystalline phases.
Type of Medium:
Online Resource
ISSN:
0424-8201
,
2690-1315
DOI:
10.1017/S0424820100176666
Language:
English
Publisher:
Cambridge University Press (CUP)
Publication Date:
1990
SSG:
11
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