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  • 1995-1999  (15)
Publikationsart
Schlagwörter
Verlag/Herausgeber
Erscheinungszeitraum
Jahr
  • 1
    Digitale Medien
    Digitale Medien
    Remote optical detection using microcantilevers (1996)
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 67 (1996), S. 3434-3439 
    Details
    ISSN: 1089-7623
    Quelle: AIP Digital Archive
    Thema: Physik , Elektrotechnik, Elektronik, Nachrichtentechnik
    Notizen: The feasibility of microcantilever-based optical detection is demonstrated. Microcantilevers may provide a simple means for developing single-element and multielement infrared sensors that are smaller, more sensitive, and lower in cost than quantum well, thermoelectric, or bolometric sensors. Here we specifically report here on an evaluation of laboratory prototypes that are based on commercially available microcantilevers, such as those used in atomic force microscopy. In this work, optical transduction techniques were used to measure microcantilever response to remote sources of thermal energy. The noise equivalent power at 20 Hz for room temperature microcantilevers was found to be approximately 3.5 nW/(square root of)Hz, with a specific detectivity of 3.6×107 cm Hz1/2/W, when an uncoated microcantilever was irradiated by a low-power diode laser operating at 786 nm. Operation is shown to be possible from dc to kHz frequencies, and the effect of cantilever shape and the role of absorptive coatings are discussed. Finally, spectral response in the midinfrared is evaluated using both coated and uncoated microcantilevers. © 1996 American Institute of Physics.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1063/1.1147149
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  • 2
    Digitale Medien
    Digitale Medien
    Micromechanical sensors for chemical and physical measurements (1995)
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 66 (1995), S. 3662-3667 
    Details
    ISSN: 1089-7623
    Quelle: AIP Digital Archive
    Thema: Physik , Elektrotechnik, Elektronik, Nachrichtentechnik
    Notizen: The advent of inexpensive, mass-produced microcantilevers promises to bring about a revolution in the field of chemical and physical sensor design. In this paper, a novel class of highly sensitive sensors are discussed that are based on commercially available microcantilevers, such as those used in atomic force microscopy. When coated with a sensitizing overlayer, these microcantilevers show significant changes in two independent analyte-induced signals, resonance frequency and static bending, as the result of exposure to various chemical and physical phenomena. Resonance frequency shift has the particular advantage of being relatively insensitive to interference from external factors such as thermal drift. Examples of micromechanical sensors based on this approach that are capable of detecting mercury vapor (with a sensitivity of 1.25 Hz/pg and linear correlation of 0.998), relative humidity (55 Hz/%R.H., correlation=0.999), or optical irradiation (10 Hz/nJ response) are discussed in detail, along with the effects of coatings on sensitivity, linearity, and reversibility of response. Further, extension of this tremendously flexible concept into a universal detection paradigm for chemical and physical phenomena is examined. © 1995 American Institute of Physics.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1063/1.1145484
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  • 3
    Digitale Medien
    Digitale Medien
    Ferromagnetic nanocomposite films of cobalt in a ceramic matrix formed by thermal decomposition of cobalt nitride, CoN, precursor (1996)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 79 (1996), S. 7905-7910 
    Details
    ISSN: 1089-7550
    Quelle: AIP Digital Archive
    Thema: Physik
    Notizen: Cobalt nitride films, CoN, in a pure form and also as a nanocomposite in boron nitride or silicon nitride were generated by reactive sputtering of cobalt metal, cobalt boride, or cobalt silicide as targets, respectively, in a nitrogen plasma. Cobalt nitride decomposes into the elements by heating under vacuum at 500 °C. The nanostructure of the composites was preserved in the heating treatment thus creating a fine dispersion (〈10 nm) of cobalt particles, in a ceramic matrix. The magnetic properties of the nanocomposites were established. The precursor cobalt nitride is paramagnetic while the cobalt dispersions, having dimensions smaller than single magnetic domain, show characteristics typical of those systems such as superparamagnetism and, at temperatures lower than the blocking temperature, marked hysteresis. The coercive fields at 5 K for the BN and Si3N4 nanocomposites are 3250 and 850 Oe, respectively. These films are of interest as data recording media.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1063/1.362402
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  • 4
    Digitale Medien
    Digitale Medien
    Fabrication of large arrays of micron-scale magnetic features by selective area organometallic chemical vapor deposition (1996)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 80 (1996), S. 1867-1871 
    Details
    ISSN: 1089-7550
    Quelle: AIP Digital Archive
    Thema: Physik
    Notizen: We demonstrate that it is possible to deposit a wide range of magnetic features, using photoassisted selective area organometallic chemical vapor deposition. Large arrays of identical micron-scale Ni features were deposited on a Si(111) wafer by this method. Their magnetic properties were studied by alternating gradient force magnetometry as well as magnetic force microscopy. Our morphological and magnetic measurements show that the structures are spatially well defined, and the magnetic properties are related to the structural shapes of the features. This method can be adapted to the fabrication of smaller-scale magnetic and electronic devices. © 1996 American Institute of Physics.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1063/1.362999
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  • 5
    Digitale Medien
    Digitale Medien
    Harmonic response of near-contact scanning force microscopy (1995)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 78 (1995), S. 1465-1469 
    Details
    ISSN: 1089-7550
    Quelle: AIP Digital Archive
    Thema: Physik
    Notizen: One-dimensional harmonic oscillator theory was used to model tapping-mode atomic force microscope (TMAFM) operation in the near-contact region in the presence of gases and liquids. The force derivative of the tip-sample interaction changes the vibration amplitude and frequency at maximum amplitude of the cantilever. Additionally, the interaction is hydrodynamically damped by fluid motion around the tip and between the tip and the surface. Good agreement was found between theoretical and experimental amplitude as a function of height. For a sample-driven TMAFM operating in fluids, the cantilever can be very soft (spring constant (very-much-less-than)1 N/m) and operated at frequencies well above the fundamental. Under these conditions the cantilever and sample appear to act with a high spring constant, much like that used in a gaseous operation. The tip–sample interaction in the fluid is still mediated through the force derivative of the sample. © 1995 American Institute of Physics.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1063/1.360304
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  • 6
    Digitale Medien
    Digitale Medien
    Adsorption-induced surface stress and its effects on resonance frequency of microcantilevers (1995)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 77 (1995), S. 3618-3622 
    Details
    ISSN: 1089-7550
    Quelle: AIP Digital Archive
    Thema: Physik
    Notizen: It is well known that bimetallic microcantilevers can exhibit static deflection as a result of thermal effects, including exothermic adsorption of chemicals on their surfaces. It is shown here that the resonance frequency of a cantilever can change due to a combination of mass loading and change of spring constant resulting from adsorption of chemicals on the surface. Cantilevers also undergo static bending that is induced by differential surface stress. The magnitude of these effects depends upon the chemical properties of the surface and upon the amount of material adsorbed. Hence cantilever deflection as well as resonance frequency change can be used as the basis for development of novel chemical sensors. © 1995 American Institute of Physics.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1063/1.359562
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  • 7
    Digitale Medien
    Digitale Medien
    Uncooled thermal imaging using a piezoresistive microcantilever (1996)
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 69 (1996), S. 3277-3279 
    Details
    ISSN: 1077-3118
    Quelle: AIP Digital Archive
    Thema: Physik
    Notizen: The operation of an uncooled, microcantilever-based infrared (IR) imaging device is demonstrated. Bending of the microcantilever is a function of the IR radiation intensity incident on the cantilever surface. The infrared image of the source is obtained by rastering a microfabricated cantilever over the image formed at the focal plane of a concave mirror. The bending variation of the microcantilever, as it scanned the focal plane of the mirror, is used to construct an infrared image of the source in front of the mirror. The thermal image obtained by scanning a single element cantilever is presented. © 1996 American Institute of Physics.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1063/1.117309
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  • 8
    Digitale Medien
    Digitale Medien
    Remote infrared radiation detection using piezoresistive microcantilevers (1996)
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 69 (1996), S. 2986-2988 
    Details
    ISSN: 1077-3118
    Quelle: AIP Digital Archive
    Thema: Physik
    Notizen: A novel micromechanical infrared (IR) radiation sensor has been developed using commercially available piezoresistive microcantilevers. Microcantilevers coated with a heat absorbing layer undergo bending due to the differential stress between the top layer (coating) and the substrate. The bending causes a change in the piezoresistance and is proportional to the amount of heat absorbed. The microcantilever IR sensor exhibits two distinct thermal responses: a fast one (〈ms) and a slower one (∼10 ms). A noise equivalent power (at a modulation frequency of 30 Hz) was estimated to be ∼70 nW/Hz1/2. This value can be further reduced by designing microcantilevers with better thermal isolation that can allow microcantilevers to be used as uncooled IR radiation detectors. © 1996 American Institute of Physics.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1063/1.117752
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  • 9
    Digitale Medien
    Digitale Medien
    Viscous drag measurements utilizing microfabricated cantilevers (1996)
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 68 (1996), S. 3814-3816 
    Details
    ISSN: 1077-3118
    Quelle: AIP Digital Archive
    Thema: Physik
    Notizen: The influence of viscous drag forces on cantilevers is investigated using standard atomic force microscope (AFM) cantilevers. Viscosity effects on several geometrically different cantilevers manifest themselves as variations in resonance frequencies, quality factors, and cantilever response amplitudes. With this novel measurement, a single cantilever can be used to measure viscosities ranging from η=10−2 to 102 g/cm s. © 1996 American Institute of Physics.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1063/1.116626
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  • 10
    Digitale Medien
    Digitale Medien
    Detection of mercury vapor using resonating microcantilevers (1995)
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 66 (1995), S. 1695-1697 
    Details
    ISSN: 1077-3118
    Quelle: AIP Digital Archive
    Thema: Physik
    Notizen: Oscillating silicon nitride microcantilevers coated with a thin gold film have been used to detect mercury vapor in air. Cantilever resonance frequency changes due to surface mass loading as a result of adsorption of mercury vapor. Furthermore, cantilever bending is also altered due to changes in surface stress induced by mercury adsorption on the gold overlayer. Both of these phenomena can be used to quantitatively detect adsorbed vapors with picogram mass resolution. © 1995 American Institute of Physics.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1063/1.113896
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