ISSN:
1089-7623
Source:
AIP Digital Archive
Topics:
Physics
,
Electrical Engineering, Measurement and Control Technology
Notes:
A molecular beam apparatus which was formerly used for crossed molecular beam chemiluminescence experiments under high vacuum conditions has been modified into an ultrahigh vacuum apparatus with a rotatable mass spectrometer detector equipped with an electron bombardment ionizer to study (1) the molecule-surface scattering process, (2) molecular beam-surface reaction dynamics, and (3) light-excited molecular desorption. Every flange surface originally sealed using a Viton o ring is sealed with a combination of an inner spring-loaded Teflon or aluminum seal with an outer Viton o ring, the intermediate region being pumped with a diffusion pump. Due to the limited space available for a rotatable detector chamber and to make the neutral flight length in time-of-flight (TOF) measurements as long as possible, the electron bombardment ionizer is installed at the farthest end of a triply differentially pumped detector chamber; thus, the ions formed are extracted toward the reverse direction of the scattered neutral molecular beam, mass selected with a quadrupole mass filter, and detected by an electron multiplier. Using this apparatus, angular and TOF distributions have been measured for Xe scattered from crystalline graphite surface and for the desorbed product, SiCl2, from the etching reaction of Si(111) with a beam of hyperthermal Cl2 molecules. © 1999 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1149673
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