In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 38, No. 3S ( 1999-03-01), p. 1730-
Abstract:
The design thinking, implementation, and testing results of a
newly developed Doppler interferometer is described. The three built-in measuring modes including (1) single-beam mode for
measuring absolute vibration, (2) dual-beam for measuring differential vibration, and (3) distance measuring, are all
presented. To facilitate the application of this interferometer for advanced optical storage applications, a circular polarization
interferometer configuration was adopted to a rrive at a compact size
and to enable the adoption of a built-in microscopic imaging system that can be used both as an alignment aid and as a sample imaging
system. The configuration of the inherent dynamic system analysis capabilities that can be used to investigate the Bode plot of
optical storage systems is also examined in detail. The nanometer resolution and megahertz bandwidth capabilities of this
interferometer were verified in various advanced optical storage systems related experiments.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.38.1730
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
1999
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7
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