In:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, American Vacuum Society, Vol. 17, No. 1 ( 1999-01-01), p. 246-249
Abstract:
The nitrogen-doped diamond-like-carbon (DLC) coating on the molybdenum field emitter arrays (Mo-FEAs) was reported to improve the electron emission characteristics. The plasma enhanced chemical vapor deposition method using a layer-by-layer technique was applied to deposit DLC films. Field emission characteristics were measured and the possibility of applying N-doped DLC coated emitters to high frequency vacuum devices was reported. The turn-on voltage of DLC coated FEAs was decreased from 75 to 55 V and the emission current was more stable than that of noncoated FEAs. The total transconductance of FEAs was increased and the effective work function of emitters was reduced by the N-type DLC coating.
Type of Medium:
Online Resource
ISSN:
1071-1023
,
1520-8567
Language:
English
Publisher:
American Vacuum Society
Publication Date:
1999
detail.hit.zdb_id:
3117331-7
detail.hit.zdb_id:
3117333-0
detail.hit.zdb_id:
1475429-0
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