In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 39, No. 5S ( 2000-05-01), p. 3032-
Abstract:
Among the important properties required for surface acoustic waves (SAW)
substrates are a large electromechanical coupling coefficient ( k 2 ), small
temperature coefficient of frequency (TCF) and low propagation loss. The LiNbO 3 and LiTaO 3 have good properties as the SAW substrates with a large size.
U nfortunately, these possess the defect of having large values of TCF. In this paper,
SAW-bonded composite substrates with a large k 2 , small TCF, low propagation loss
and no dispersion using conventional bonders are investigated theoretically and experimentally. The propagation characteristics of SAWs under strained piezoelectric
crystals using the higher-order elasticity theory have been analyzed. The theoretical results show zero TCF on LiNbO 3 /SiO 2 substrates. The experimental results
for LiNbO 3 /glass substrates revealed a TCF of [-19 ppm/°C]. The propagation properties were almost the same as those of the single crystal.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.39.3032
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
2000
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7
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