In:
Applied Physics Letters, AIP Publishing, Vol. 85, No. 23 ( 2004-12-06), p. 5727-5729
Abstract:
We demonstrate an approach for nanometer-scale lithography of diamond-like carbon films employing a local electron injection from a scanning tunneling microscope tip under ultrahigh-vacuum conditions. The electrons induce a graphitization of the tetrahedrally bound carbon. With this technique, complex patterns of conducting lines and dots smaller than 10nm can be written. Tunneling spectroscopy and conductive force microscopy were used to further characterize the carbon nanostructures.
Type of Medium:
Online Resource
ISSN:
0003-6951
,
1077-3118
Language:
English
Publisher:
AIP Publishing
Publication Date:
2004
detail.hit.zdb_id:
211245-0
detail.hit.zdb_id:
1469436-0
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