In:
Microelectronic Engineering, Elsevier BV, Vol. 66, No. 1-4 ( 2003-4), p. 760-766
Type of Medium:
Online Resource
ISSN:
0167-9317
DOI:
10.1016/S0167-9317(02)00996-6
Language:
English
Publisher:
Elsevier BV
Publication Date:
2003
detail.hit.zdb_id:
1497065-X
detail.hit.zdb_id:
605230-7
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