In:
teme, Walter de Gruyter GmbH, Vol. 75, No. 5 ( 2008-05), p. 298-310
Abstract:
Micro- and nanotechnology experienced a high economic growth in recent years. This yields in a growing demand for measuring instruments which are closely linked to the production process. Virtual measuring instruments provide knowledge for the development of new systems, the analysis and optimization of established devices as well as the determination of the uncertainty in measurement. The virtual measuring process consists of the measuring instrument, the sample, and the interaction between both. In this article examples of current developments of virtual instruments are presented and their way of utilization is discussed.
Type of Medium:
Online Resource
ISSN:
2196-7113
,
0171-8096
DOI:
10.1524/teme.2008.0872
Language:
English
Publisher:
Walter de Gruyter GmbH
Publication Date:
2008
detail.hit.zdb_id:
2025790-9
SSG:
15,3
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