In:
Shinku, The Vacuum Society of Japan, Vol. 49, No. 3 ( 2006), p. 159-161
Type of Medium:
Online Resource
ISSN:
0559-8516
,
1880-9413
Uniform Title:
高周波多重磁極スパッタ法によるニッケル薄膜の作製
Language:
Japanese
Publisher:
The Vacuum Society of Japan
Publication Date:
2006
detail.hit.zdb_id:
2397282-8
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