In:
Optics and Precision Engineering, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Vol. 21, No. 6 ( 2013), p. 1425-1433
Type of Medium:
Online Resource
ISSN:
1004-924X
Uniform Title:
光刻投影物镜中的透镜X-Y柔性微动调整机构
DOI:
10.3788/OPE./2013/21/6
DOI:
10.3788/OPE.20132106.1425
Language:
English
,
Chinese
Publisher:
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences
Publication Date:
2013
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