In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 36, No. 8R ( 1997-08-01), p. 5286-
Kurzfassung:
The discharge characteristics in a range of driving frequencies from 400 kHz to 1 MHz have been investigated by current-voltage measurements and optical emission spectroscopy. At pressures higher than 0.2 Torr, the discharge impedance is resistive, and the intense emission just in front of the instantaneous anode due to the double layer is observed around the phases of ω t =π/2 and 3π/2. These results are similar to those in strong electronegative SF 6 discharges. On the other hand, at 0.1 Torr, the discharge impedance is capacitive, and the discharge is of the so-called wave-riding mode. The discharge structure at 1 MHz is scarcely changed by mixing a large amount O 2 with C 4 F 8 at a pressure of 0.5 Torr due to the high electronegativity of C 4 F 8 .
Materialart:
Online-Ressource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.36.5286
Sprache:
Unbekannt
Verlag:
IOP Publishing
Publikationsdatum:
1997
ZDB Id:
218223-3
ZDB Id:
797294-5
ZDB Id:
2006801-3
ZDB Id:
797295-7
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