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  • Acta Physica Sinica, Chinese Physical Society and Institute of Physics, Chinese Academy of Sciences  (4)
  • 2015-2019  (4)
  • 1
    Online Resource
    Online Resource
    Acta Physica Sinica, Chinese Physical Society and Institute of Physics, Chinese Academy of Sciences ; 2017
    In:  Acta Physica Sinica Vol. 66, No. 4 ( 2017), p. 046801-
    In: Acta Physica Sinica, Acta Physica Sinica, Chinese Physical Society and Institute of Physics, Chinese Academy of Sciences, Vol. 66, No. 4 ( 2017), p. 046801-
    Abstract: All planned inertial confinement fusion (ICF) capsule targets except machined beryllium require plastic mandrels with tight requirements on which the ablator is built. In this paper, the fabrication of poly(-methylstyrene) (PAMS) mandrel is studied. PAMS mandrels are produced by using microencapsulation technique. This technique involves producing a water droplet (W1) encapsulated by a flourobenzen (FB) solution of PAMS (O) with a droplet generator, and this droplet is then flushed off by external phase (W2), forming a water-in-oil-in-water (W1/O/W2) compound-emulsion droplet, which is suspended in a stirred flask filled with external phase to cure. The encapsulation process is based on a microfluid technique, which can achieve the controlled production of millimeter-scale PAMS mandrels. In this work, capillaries-based co-flowing microfluidic triple orifice generator is designed and built to fabricate W1/O/W2 droplets. Two configurations of the droplet generator:one-step device and two-step device, are employed in this experiment. In one-step device, the end of oil phase capillary is located at the same position as the end of inner water phase capillary. So the core droplet and the shell droplet break off from their capillaries ends at the same time, forming a W1/O/W2 droplet. While in the two-step device, the W1 phase capillary tip is located upstream to the W2 phase capillary tip. As a result, the core droplet and the shell droplet depart from the ends of their capillaries respectively, forming a W1/O/W2 droplet as well. Differently, the shell droplet contains only one core droplet in one-step generator, while several core droplets are contained in the shell droplet in two-step generator. In this paper, the mechanism of the droplet formation and the effect of the flow rate on the size of the droplet are studied with these two configurations. Results show that tiny difference between the two generators will lead to great differences in droplet formation mechanism and size control. In the two-step generator, the inner phase flow rate has little influence in the outer diameter of the compound-emulsion droplet. The diameters of the compound-emulsion droplets have a similar change to the diameters of the single droplets (O/W2). In one-step device, the inner phase flow rate has a significant influence on the outer diameter of the double-emulsion droplet because of the existence of W1-O interface. Finally, the compound-emulsion droplets fabricated in this experiment are cured in external phase, after which PAMS mandrels are fabricated. The diameters of the final PAMS mandrels are measured with optical microscope. The distribution of the diameters well concentrates in an area of (200010) upm, which is favorable for producing the PAMS mandrels with a diameter of 2000 upm.
    Type of Medium: Online Resource
    ISSN: 1000-3290 , 1000-3290
    Language: Unknown
    Publisher: Acta Physica Sinica, Chinese Physical Society and Institute of Physics, Chinese Academy of Sciences
    Publication Date: 2017
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  • 2
    In: Acta Physica Sinica, Acta Physica Sinica, Chinese Physical Society and Institute of Physics, Chinese Academy of Sciences, Vol. 66, No. 9 ( 2017), p. 095203-
    Abstract: High-power impulse magnetron sputtering (HiPIMS), a new physical vapor deposition technique which combines the advantages of the high ionization rates of the sputtered materials and control of electromagnetism, has been widely used to deposit high-performance coatings with a large density and high adhesion. However, HiPIMS has some intrinsic disadvantages such as the low deposition rate, unstable discharge, and different ionization rates for different materials thereby hampering wider industrial adoption. We have recently designed an optimized cylindrical source based on the hollow cathode effect to circumvent the aforementioned limitations. However, during the operation of the cylindrical source, the discharge is inhomogeneous and the etching stripes are nonuniform. In order to determine the underlying mechanism and optimize the electromagnetic control, the discharge in the HiPIMS cylindrical source is simulated. The tangential magnetic field distribution on the target surface of the cylindrical sputtering source is inhomogeneous and electron runaway is serious, resulting in a relatively low plasma density. Two solutions are proposed to improve the situations. The first one is electrical improvement by installing an electron blocking plate, and the second one is magnetic improvement by adding compensating magnets. Our simulation results of the first method show that a potential well is produced by the electron blocking plate to suppress electron runaway and the plasma density is improved significantly, especially around the central cross-section of the cylindrical sputtering source. The discharge becomes homogeneous, and the etching stripes are uniform albeit not full enough. The second method of magnetic improvement significantly improves the homogeneity of the tangential magnetic field distribution on the target surface and the target utilization rate. After adding the optimized compensating magnets, the shape of the effective area (the value of the tangential magnetic field in a range of 25-50 mT) on the target surface can be controlled and made zonal. The target utilization rate increases to over 80% from 60%. In order to obtain the optimal conditions, the two techniques are combined. A larger and more homogeneous etching ring is observed by adopting both the electrical and magnetic improvements as predicted and explained by the simulation results. It can be concluded that the combination of the two improvement techniques can improve and optimize the HiPIMS cylindrical source.
    Type of Medium: Online Resource
    ISSN: 1000-3290 , 1000-3290
    Language: Unknown
    Publisher: Acta Physica Sinica, Chinese Physical Society and Institute of Physics, Chinese Academy of Sciences
    Publication Date: 2017
    Location Call Number Limitation Availability
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  • 3
    In: Acta Physica Sinica, Acta Physica Sinica, Chinese Physical Society and Institute of Physics, Chinese Academy of Sciences, Vol. 65, No. 18 ( 2016), p. 185202-
    Abstract: High power impulse magnetron sputtering (HiPIMS) is a popular physical vapor deposition (PVD) technology because of the high ionization of the sputtering materials, large coating density, good adhesion, and other favorable properties. However, this technique suffers some disadvantages such as the small deposition rate induced by the high target potential, the metallic droplets produced by the unstable discharge, and different ionizations for different sputtering materials, thereby hampering wider acceptance by the industry. A cylindric HiPIMS source in which the discharge is restricted in the cylinder is described in this paper. By using this source, coatings can be deposited with 100% ions without metallic droplets arising from the unstable discharge, and the unionized sputtered atoms cannot be extracted by the extraction grid with negative potential. Electron oscillation and repetitive sputtering of the unionized atoms occur in the cylinder to enhance collision and ionization. Due to the enlarged discharge area by the cylinder internal surface comparing with the area of the ion outlet (end face of the cylinder), the sputtering ions converge from the inwall to the center of the cylinder target and form an enhanced flow to spray out from the source, which will improve the deposition rate. The structure and discharge characteristics of the novel HiPIMS source are investigated by simulation and experiments. Our results indicate that 8 magnets can provide the reasonable magnetic field and the highest target utilization rate. The distributions of electrons and ions in the target each consist of 8 petals in the optimized magnetic structure, and the highest plasma density happens near the target, which is above 1.31017 m-3. The discharge characteristics confirm that the cylindric sputtering source can be operated under HiPIMS conditions and the evolution of the target currents with target voltage exhibits I-V characteristics typical of HiPIMS. An obvious pre-ionization is observed on the discharge glow and discharge current curves when the extra direct current (DC) is added. The racetrack area is about 60.0% of the target surface. The ion current curves are similar to those of the target currents, but a 40 s delay and about one-tenth current value are observed compared with the target currents. The sputtering is improved by the extra DC, inducing the increased metallic ions and the opposite evolution of gas ions. The results suggest that the cylindric sputtering source can be effectively used to conduct HiPIMS and is a novel way to improve and promote the application of HiPIMS.
    Type of Medium: Online Resource
    ISSN: 1000-3290 , 1000-3290
    Language: Unknown
    Publisher: Acta Physica Sinica, Chinese Physical Society and Institute of Physics, Chinese Academy of Sciences
    Publication Date: 2016
    Location Call Number Limitation Availability
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  • 4
    In: Acta Physica Sinica, Acta Physica Sinica, Chinese Physical Society and Institute of Physics, Chinese Academy of Sciences, Vol. 65, No. 7 ( 2016), p. 073101-
    Abstract: HfO2-based resistive random access memory takes advantage of metal dopants defects in its principle of operation. Then, it is significantly important to study the performance of metal dopants in the formation of conductive filament. Except for the effects of the applied voltage, the orientation and concentration mechanism of the Ag dopants are investigated based on the first principle. First, five possible models of Ag in HfO2 are established in [001], [010], [100], [-111] and [110] directions, in each of which adequate and equal dopants of Ag are ensured. The isosurface plots of partial charge density, formation energy, highest isosurface value and migration barrier of Ag dopants are calculated and compared to investigate the promising formation direction of Ag in the five established orientation systems. The formations of conductive filament are observed in [100], [010], [001] and [-111] directions in the unit cell structure from the isosurface plots of partial charge density. But no filament is formed in [110] direction. And the highest isosurface value of Ag dopant is largest in [-111] direction. This indicates that the most favorable conductive filament formation takes place in this direction. The formation energy of Ag in the different direction is different, and the values in [-111] and [100] direction are minimum and close to each other, which shows that it is easy to form conductive filaments in these two directions. In addition, the smallest migration barrier of Ag in [-111] direction reveals that the [-111] orientation is the optimal conductive path of Ag in HfO2, which will effectively influence the SET voltage, formation voltage and the ON/OFF ratio of the device. Next, based on the results of orientation dependence, four different concentration models (HfAgxO2, x=2, 3, 4, 5) are established along the [-111] crystal orientation. The isosurface plots of partial charge density about those concentration models are compared, showing that the resistive switching phenomenon cannot be observed for the samples deposited in a mixture with less than 4.00 at.% of Ag content (HfAg4O2). The RS behavior is improved with Ag content increasing from 4.00 at. % to 4.95 at.%. However, the formation energy and highest isosurface value are calculated and it is found that the conductive filaments cannot be switched into a stable state when Ag content becomes greater than 4.00 at.%. Then, the total electron density of states and the projected electron density of states are also calculated for the two models. It indirectly shows that the conductive filament is mainly comprised of Ag atoms, rather than Hf atoms or oxygen vacancy. Also, it is not helpful to improve the ON/OFF ratio of the device when the Ag dopant concentration is higher than 4.00 at.%. Therefore, the best doping concentration of Ag is 4.00 at.% and it is more advantageous to change the resistance memory storage features. This work may provide a theoretical guidance for improving the performances of HfO2-based resistive random access memory.
    Type of Medium: Online Resource
    ISSN: 1000-3290 , 1000-3290
    Language: Unknown
    Publisher: Acta Physica Sinica, Chinese Physical Society and Institute of Physics, Chinese Academy of Sciences
    Publication Date: 2016
    Location Call Number Limitation Availability
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