In:
Journal of Micro/Nanolithography, MEMS, and MOEMS, SPIE-Intl Soc Optical Eng, Vol. 12, No. 4 ( 2013-11-08), p. 041309-
Type of Medium:
Online Resource
ISSN:
1932-5150
DOI:
10.1117/1.JMM.12.4.041309
Language:
English
Publisher:
SPIE-Intl Soc Optical Eng
Publication Date:
2013
detail.hit.zdb_id:
3056313-6
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