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  • 1
    Online Resource
    Online Resource
    The Electrochemical Society ; 2016
    In:  ECS Meeting Abstracts Vol. MA2016-02, No. 30 ( 2016-09-01), p. 1939-1939
    In: ECS Meeting Abstracts, The Electrochemical Society, Vol. MA2016-02, No. 30 ( 2016-09-01), p. 1939-1939
    Abstract: Group IV semiconductors attract intensive interests for potential monolithically integrated photonics on the Si platform. The realization of Group IV-based light emitters is challenging yet highly desirable. Ge-on-Si lasing from the direct gap transition has been demonstrated at room temperature by employing n-type doping and tensile strain to reduce the energy difference between direct bandgap and indirect bandgap[1-2]. An alternative method is incorporating Sn into Ge, which shrinks the direct bandgap much faster than the indirect bandgap, thereby leading to direct bandgap GeSn alloys. We found that the incorporation of Sn into Ge can also enhance the crystallization of GeSn on amorphous substrate, which is beneficial for 3D photonic integration on Si by moving all the photonic components to the metal/dielectric interconnect level well above the CMOS layer using back-end-of-line (BEOL) processing. In our previous work, high crystallinity GeSn substitutional alloy thin films with up to 9 at.% Sn are directly grown on amorphous SiO 2 layers at low crystallization temperatures of 370~470 °C, eliminating the thick buffer layer commonly used in epitaxial GeSn on Si.[3] Recently, epitaxial GeSn-based lasing is reported in the near mid-infrared wavelength range, but only observed at low temperatures [4]. A detailed understanding of the ultrafast carrier dynamics is necessary to design and optimize high-performance GeSn lasers operating at room temperature. In this study, we investigate the power-dependent femtosecond transient gain of direct-gap GeSn with 9% Sn thin films crystallized on amorphous SiO 2 layers in the wavelength range of 1950~2350 nm. It is found at carrier injection density Δn 〈 1×10 17 cm -3 , the transmission of GeSn is same as that measured by Fourier Transfer Infrared spectroscopy (FTIR), i.e. no optical bleaching. When the injection density is increased to Δn~8×10 18 cm -3  , the GeSn film becomes transparent at λ~2000 nm. At higher injection of Δn~2×10 19 cm -3 , net transient gain is observed at λ=1900-2150 nm, with a peak gain of 6300 cm -1 at λ=2000 nm . Further increasing the carrier injection to Δn~1×10 20 cm -3 , the peak of transient gain red-shifted to 2100 nm due to the bandgap renormalization, and the peak gain further increases to ~8000 cm -1 . The transient gain of GeSn with 9% Sn is similar to III-V direct bandgap semiconductors at similar injection levels. These results confirm that the GeSn thin film crystalized on amorphous SiO2 is a good optical gain medium. Further studies will reveal more detailed carrier dynamics between direct and indirect conduction valleys. [1] R. E. Camacho-Aguilera, Y. Cai, N. Patel, J. T. Bessette, M. Romagnoli, L. C. Kimerling, and J. Michel, Opt. Express . 20, 11316 (2012). [2] R. Koerner, M. Oehme, M. Gollhofer, et al, Opt. express, 23, 14815 (2015). [3] H. Li, J. Brouillet, A. Salas, X. Wang and J. Liu, Opt. Mater. Express 3, 1385 (2013). [4] S.Wirths, R. Geiger, N.von den Diresch, et al, Nature Photonics, 9, 88 (2015).
    Type of Medium: Online Resource
    ISSN: 2151-2043
    Language: Unknown
    Publisher: The Electrochemical Society
    Publication Date: 2016
    detail.hit.zdb_id: 2438749-6
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  • 2
    Online Resource
    Online Resource
    Optica Publishing Group ; 2013
    In:  Optical Materials Express Vol. 3, No. 9 ( 2013-09-01), p. 1385-
    In: Optical Materials Express, Optica Publishing Group, Vol. 3, No. 9 ( 2013-09-01), p. 1385-
    Type of Medium: Online Resource
    ISSN: 2159-3930
    Language: English
    Publisher: Optica Publishing Group
    Publication Date: 2013
    detail.hit.zdb_id: 2619914-2
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  • 3
    Online Resource
    Online Resource
    Frontiers Media SA ; 2019
    In:  Frontiers in Physics Vol. 7 ( 2019-9-23)
    In: Frontiers in Physics, Frontiers Media SA, Vol. 7 ( 2019-9-23)
    Type of Medium: Online Resource
    ISSN: 2296-424X
    Language: Unknown
    Publisher: Frontiers Media SA
    Publication Date: 2019
    detail.hit.zdb_id: 2721033-9
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  • 4
    Online Resource
    Online Resource
    The Electrochemical Society ; 2016
    In:  ECS Meeting Abstracts Vol. MA2016-02, No. 30 ( 2016-09-01), p. 2025-2025
    In: ECS Meeting Abstracts, The Electrochemical Society, Vol. MA2016-02, No. 30 ( 2016-09-01), p. 2025-2025
    Abstract: In this paper, we systematically research the thermal evolution of substitutional Sn composition, tensile strain, and the direct bandgap of highly (111) textured, direct-gap Ge 1-x Sn x (0.075 〈 x 〈 0.085) thin films crystallized on amorphous SiO 2 layers. We are able to demonstrate highly effective strain induced band-engineering in Ge 1-x Sn x as high performance optoelectronic materials for monolithic 3D electronic-photonic integration. For a Ge 0.913 Sn 0.087 thin film, x Sn stays at 8.7 at. % without any Sn segregation even after 2 hours of annealing at the crystallization temperature of 464 o C, indicating that the material is thermally stable in the entire back-end-of-the-line processing temperature range ( 〈 450 o C). We then sequentially anneal the Ge 0.913 Sn 0.087  sample from 500 o C to 700 o C at a step of 50 o C, for 15 min each step, and selectively etch away any surface segregated Sn after each step. After analyzing the materials using a combination of X-ray Diffraction (XRD) and Raman spectroscopy, we determine that the crystallinity improves with the increase of annealing temperature, as evidenced by decreased full width at half maximum of both Raman and XRD peaks. The GeSn film maintained its strong (111) texture, as evidenced by the 〉 270 ratio of the strongest to second strongest XRD peak. The x Sn only decreases slightly from 8.3 at. % at 500 o C to 7.4 at. % at 700 o C, still ~7 times higher than the equilibrium solubility limit of ~1 at. % whereas the in-plane tensile strain e ||  increases by nearly 4 times from 0.12% to 0.44%. By measuring and fitting the absorption spectra, we find that remarkably, the 0.44% thermally induced biaxial tensile strain reduces the direct bandgap by as much as 0.125 eV, twice as effective as the tensile strain in Ge(100) films. Due to a smaller Poisson’s ratio under biaxial tensile stress, the (111) oriented films experience larger volume dilatation than their (100) oriented counterparts under the same in-plane tensile strain, thereby enhancing the beneficial effects of tensile strain on the indirect-to-direct gap transition. By fitting the data with deformation potential theory, we derive a dilatational deformation potential of -12.8+/-0.8 eV for Ge 1-x Sn x thin films with x Sn =8 at.%. Despite of the slight decrease in Sn composition at high annealing temperatures, the tensile-strain-induced direct-gap shrinkage, not only extends the optical response to λ = 2.8 um for MIR applications but also leads to stronger direct-gap semiconductor behavior. These results indicate that tensile strained GeSn crystallized on amorphous layers offers both excellent direct-gap optoelectronic properties and fabrication/operation robustness for integrated photonics. The same concept can also be readily applied to epitaxial GeSn on (111) substrates to achieve more effective strain-induced band engineering. Figure 1
    Type of Medium: Online Resource
    ISSN: 2151-2043
    Language: Unknown
    Publisher: The Electrochemical Society
    Publication Date: 2016
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  • 5
    Online Resource
    Online Resource
    AIP Publishing ; 2016
    In:  Applied Physics Letters Vol. 108, No. 10 ( 2016-03-07)
    In: Applied Physics Letters, AIP Publishing, Vol. 108, No. 10 ( 2016-03-07)
    Abstract: We demonstrate highly effective strain-induced band-engineering of (111) oriented direct-gap Ge1−xSnx thin films (0.074  & lt; x  & lt; 0.085) crystallized on amorphous SiO2 towards 3D photonic integration. Due to a much smaller Poisson's ratio for (111) vs. (100) orientation, 0.44% thermally induced biaxial tensile strain reduces the direct-gap by 0.125 eV towards enhanced direct-gap semiconductor properties, twice as effective as the tensile strain in Ge(100) films. Correspondingly, the optical response is extended to λ = 2.8 μm. A dilatational deformation potential of a = −12.8 ± 0.8 eV is derived. These GeSn films also demonstrate high thermal stability, offering both excellent direct-gap optoelectronic properties and fabrication/operation robustness for integrated photonics.
    Type of Medium: Online Resource
    ISSN: 0003-6951 , 1077-3118
    RVK:
    Language: English
    Publisher: AIP Publishing
    Publication Date: 2016
    detail.hit.zdb_id: 211245-0
    detail.hit.zdb_id: 1469436-0
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  • 6
    Online Resource
    Online Resource
    AIP Publishing ; 2012
    In:  Applied Physics Letters Vol. 101, No. 20 ( 2012-11-12)
    In: Applied Physics Letters, AIP Publishing, Vol. 101, No. 20 ( 2012-11-12)
    Abstract: Selective solar thermal absorber coating is an important component of concentrated solar power systems. It maximizes the absorption of solar spectrum and minimizes thermal radiation losses in the mid-infrared regime. In this letter, we demonstrate a solution-processed plasmonic Ni nanochain-Al2O3 selective solar thermal absorber with a high solar absorptance & gt;90% and a low thermal emittance loss & lt;10%. Unlike conventional graded-index cermet coatings, the spectral selectivity is tailored by the lengths of Ni nanochains, elimating the requirement of costly vacuum deposition for stringent thickness control. These results open a path to utilize plasmonics for low-cost, high-performance solar thermal systems.
    Type of Medium: Online Resource
    ISSN: 0003-6951 , 1077-3118
    RVK:
    Language: English
    Publisher: AIP Publishing
    Publication Date: 2012
    detail.hit.zdb_id: 211245-0
    detail.hit.zdb_id: 1469436-0
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  • 7
    Online Resource
    Online Resource
    The Electrochemical Society ; 2014
    In:  ECS Transactions Vol. 64, No. 6 ( 2014-08-12), p. 819-827
    In: ECS Transactions, The Electrochemical Society, Vol. 64, No. 6 ( 2014-08-12), p. 819-827
    Abstract: Highly textured Ge 0.91 Sn 0.09 is obtained on both amorphous SiO 2 /Si and glass substrates at low temperatures 〈 475 o C, which shows grain sizes up to tens of microns. Strikingly, the nucleation center spacing ranges from 0.1 to 1 mm, orders of magnitude larger than common solid state crystallization. This observation indicates an exceedingly high grain growth rate vs. a low nucleation rate. Therefore, we can control nucleation sites and fabricate geometrically confined pseudo single crystalline GeSn grain using patterning techniques, including surface Sn dots/patches, local laser annealing, and nanotaper patterns. Another remarkable result is that ~9 at.% Sn is incorporated substitutionally into Ge, far exceeding the equilibrium solubility limit of ~1 at.%. The high Sn composition, together with ~0.24% thermally induced tensile strain in the film, shifts the GeSn direct band gap to ~0.5 eV (2500nm) and converts it into a direct band gap semiconductor with significantly enhanced optoelectronic properties.
    Type of Medium: Online Resource
    ISSN: 1938-5862 , 1938-6737
    Language: Unknown
    Publisher: The Electrochemical Society
    Publication Date: 2014
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  • 8
    Online Resource
    Online Resource
    The Electrochemical Society ; 2016
    In:  ECS Transactions Vol. 75, No. 8 ( 2016-08-18), p. 623-632
    In: ECS Transactions, The Electrochemical Society, Vol. 75, No. 8 ( 2016-08-18), p. 623-632
    Abstract: In this paper, we systematically research the thermal evolution of substitutional Sn composition, tensile strain, and the direct band gap of highly (111) textured, direct gap Ge 1-x Sn x (0.075 〈 x 〈 0.085) thin films crystallized on amorphous SiO 2 layers. We show highly effective strain induced band engineering in Ge 1-x Sn x (111) films towards enhanced direct-gap semiconductor properties, which can be used as high performance optoelectronic materials for monolithic 3D electronic-photonic integration. A dilatational deformation potential of a =-12.8±0.8 eV is derived. We also demonstrate that the tensile strained GeSn crystallized on amorphous layers offers high thermal stability and fabrication/operation robustness for integrated photonics. The effects of geometrically-confined growth on the thermal stability of Ge 1-x Sn x were also explored by using laser annealing to induce the nucleation of different GeSn patterns. With the suppression of grain boundaries in patterned GeSn, 10-13 at.% Sn is retained at 600 °C.
    Type of Medium: Online Resource
    ISSN: 1938-5862 , 1938-6737
    Language: Unknown
    Publisher: The Electrochemical Society
    Publication Date: 2016
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  • 9
    Online Resource
    Online Resource
    The Electrochemical Society ; 2016
    In:  ECS Transactions Vol. 75, No. 8 ( 2016-08-18), p. 223-228
    In: ECS Transactions, The Electrochemical Society, Vol. 75, No. 8 ( 2016-08-18), p. 223-228
    Abstract: In this study we investigate the power-dependent femtosecond transient gain of direct-gap Ge 0.91 Sn 0.09 thin films crystallized on amorphous SiO 2 layers. At carrier injection density Δn 〈 1×10 17 cm -3 , there is no optical bleaching. When Δn increases to ~8×10 18 cm -3 , the Ge 0.91 Sn 0.09 film becomes transparent at λ~2000 nm. At higher injection of Δn~2×10 19 cm -3 , net transient gain is observed at λ=1900-2150 nm, with a peak gain of 6300 cm -1 at λ=2000 nm. Further increasing Δn to ~1×10 20 cm -3 , the peak of transient gain red-shifted to 2100 nm due to the bandgap renormalization, and the peak gain further increases to ~8000 cm -1 . The transient gain coefficient of Ge 0.91 Sn 0.09 is similar to III-V direct bandgap semiconductors at similar injection levels. The gain lifetime was measured to be ~0.1 ns at λ=2100 nm and Δn~6×10 18 cm -3 . These results confirm that direct-gap GeSn crystalized on amorphous SiO 2 is a good optical gain medium towards 3D photonic integration.
    Type of Medium: Online Resource
    ISSN: 1938-5862 , 1938-6737
    Language: Unknown
    Publisher: The Electrochemical Society
    Publication Date: 2016
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  • 10
    Online Resource
    Online Resource
    Optica Publishing Group ; 2013
    In:  Optics Letters Vol. 38, No. 5 ( 2013-03-01), p. 652-
    In: Optics Letters, Optica Publishing Group, Vol. 38, No. 5 ( 2013-03-01), p. 652-
    Type of Medium: Online Resource
    ISSN: 0146-9592 , 1539-4794
    Language: English
    Publisher: Optica Publishing Group
    Publication Date: 2013
    detail.hit.zdb_id: 243290-0
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