GLORIA

GEOMAR Library Ocean Research Information Access

Your email was sent successfully. Check your inbox.

An error occurred while sending the email. Please try again.

Proceed reservation?

Export
  • 1
    Online Resource
    Online Resource
    Springer Science and Business Media LLC ; 1999
    In:  Journal of Electronic Materials Vol. 28, No. 5 ( 1999-05), p. 572-579
    In: Journal of Electronic Materials, Springer Science and Business Media LLC, Vol. 28, No. 5 ( 1999-05), p. 572-579
    Type of Medium: Online Resource
    ISSN: 0361-5235 , 1543-186X
    Language: English
    Publisher: Springer Science and Business Media LLC
    Publication Date: 1999
    detail.hit.zdb_id: 2032868-0
    Location Call Number Limitation Availability
    BibTip Others were also interested in ...
  • 2
    Online Resource
    Online Resource
    Springer Science and Business Media LLC ; 1999
    In:  MRS Internet Journal of Nitride Semiconductor Research Vol. 4, No. S1 ( 1999), p. 805-810
    In: MRS Internet Journal of Nitride Semiconductor Research, Springer Science and Business Media LLC, Vol. 4, No. S1 ( 1999), p. 805-810
    Abstract: Gallium nitride wafer epitaxy on large diameter substrates is critical for the future fabrication of large area UV linear or 2D imaging arrays, as well as for the economical production of other GaN-based devices. Typical group III-nitride deposition is now performed on 2-inch diameter or smaller sapphire substrates. Reported here are visible blind, UV GaN p-i-n photodetectors which have been fabricated on 3-inch diameter (0001) sapphire substrates by RF atomic nitrogen plasma MBE. The uniformity across the wafer of spectral responsivity and shunt resistance (R 0 ) for the p-i-n photodetectors has been characterized. Spectral responsivity and 1/ f noise as a function of temperature exceeding 250°C will be presented for the GaN p-i-n photodetectors. Spectral response with 〉 0.17 A/W at peak wavelength and having 4-6 orders of magnitude visible rejection has been achieved. 1/ f noise typically less than 10 −14 A/Hz 1/2 at room temperature also has been achieved with GaN p-i-n photodiodes. The results have been correlated with proposed models for dark current and 1/ f noise in GaN diodes.
    Type of Medium: Online Resource
    ISSN: 1092-5783
    Language: English
    Publisher: Springer Science and Business Media LLC
    Publication Date: 1999
    detail.hit.zdb_id: 2021992-1
    Location Call Number Limitation Availability
    BibTip Others were also interested in ...
  • 3
    Online Resource
    Online Resource
    AIP Publishing ; 2000
    In:  Journal of Applied Physics Vol. 88, No. 6 ( 2000-09-15), p. 3463-3469
    In: Journal of Applied Physics, AIP Publishing, Vol. 88, No. 6 ( 2000-09-15), p. 3463-3469
    Abstract: Standard variable angle spectroscopic ellipsometry (VASE) has been employed to study the ordinary optical dielectric response of hexagonal gallium nitride (GaN) thin films—an important material for blue and ultraviolet light emitting device applications. The GaN films were grown by molecular beam epitaxy on c-plane sapphire substrates (α-Al2O3). Room temperature isotropic and anisotropic mode VASE measurements were made at angles of incidence between of 20° and 80°. Evidence of anisotropy was observed from the anisotropic mode measurements, reflecting the nature of wurtzite crystal structure of GaN. The sizable off-diagonal elements (Aps and Asp) of the Jones matrix indicate that the optical axis 〈c〉 of the c-plane sample are slightly off from the surface normal due to a small miscut of substrates. VASE data simulations by isotropic and anisotropic models indicate that the anisotropic effect on both diagonal and off-diagonal elements of the Jones matrix can be minimized to a negligible level at small angle of incidence. Thus the ordinary optical dielectric functions (E⊥〈c〉) are precisely determined by the isotropic mode VASE measurements at angles of incidence between 20° and 40° in the range of 0.75–6.5 eV. The VASE data were analyzed by a model dielectric function based on the GaN critical point structure, which allows for a nonzero extinction coefficient k below the band gap. The thicknesses of these GaN films are accurately determined via the analysis as well.
    Type of Medium: Online Resource
    ISSN: 0021-8979 , 1089-7550
    Language: English
    Publisher: AIP Publishing
    Publication Date: 2000
    detail.hit.zdb_id: 220641-9
    detail.hit.zdb_id: 3112-4
    detail.hit.zdb_id: 1476463-5
    Location Call Number Limitation Availability
    BibTip Others were also interested in ...
  • 4
    Online Resource
    Online Resource
    American Vacuum Society ; 1998
    In:  Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena Vol. 16, No. 3 ( 1998-05-01), p. 1286-1288
    In: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, American Vacuum Society, Vol. 16, No. 3 ( 1998-05-01), p. 1286-1288
    Abstract: In this work, in situ cathodoluminescence (CL) is presented as a technique to optimize the molecular beam epitaxy (MBE) growth conditions for InGaN films and structures. InGaN was grown at 1 μm/h using a reactive nitrogen rf plasma source at substrate temperatures ranging from 550 to 650 °C. The quick determination of the emission wavelength and quality from the peak position and width allowed various growth conditions and structures to be tried without removal of the sample from the MBE system. CL scans are presented from samples grown under varying Ga/In flux ratios, III/nitrogen flux ratios, and substrate temperatures showing the usefulness of in situ monitoring for MBE InGaN growth.
    Type of Medium: Online Resource
    ISSN: 1071-1023 , 1520-8567
    RVK:
    Language: English
    Publisher: American Vacuum Society
    Publication Date: 1998
    detail.hit.zdb_id: 3117331-7
    detail.hit.zdb_id: 3117333-0
    detail.hit.zdb_id: 1475429-0
    Location Call Number Limitation Availability
    BibTip Others were also interested in ...
  • 5
    Online Resource
    Online Resource
    AIP Publishing ; 2000
    In:  Applied Physics Letters Vol. 76, No. 25 ( 2000-06-19), p. 3762-3764
    In: Applied Physics Letters, AIP Publishing, Vol. 76, No. 25 ( 2000-06-19), p. 3762-3764
    Abstract: Highly resistive GaN layers grown by molecular beam epitaxy are characterized by temperature dependent conductivity and Hall effect measurements. Samples with ρ300≅3×103 Ω cm show room temperature Hall mobility of 22 and 35 cm2 V−1 s−1 and have a temperature dependence μH∼Tx with x=0.9 and 0.5. This is in contradiction to a sample with ρ300≅32 Ω cm which has a room temperature mobility of 310 cm2 V−1 s−1 and a μH∼Tx with x=−1.4. The same activation energy of 0.23 eV, attributed to donor-like defects, is found for all three samples investigated. Temperature dependent conductivity data can be reasonably fitted considering band conduction. The presence of various hopping mechanisms is discussed.
    Type of Medium: Online Resource
    ISSN: 0003-6951 , 1077-3118
    RVK:
    Language: English
    Publisher: AIP Publishing
    Publication Date: 2000
    detail.hit.zdb_id: 211245-0
    detail.hit.zdb_id: 1469436-0
    Location Call Number Limitation Availability
    BibTip Others were also interested in ...
  • 6
    Online Resource
    Online Resource
    AIP Publishing ; 2000
    In:  Journal of Applied Physics Vol. 88, No. 10 ( 2000-11-15), p. 5821-5826
    In: Journal of Applied Physics, AIP Publishing, Vol. 88, No. 10 ( 2000-11-15), p. 5821-5826
    Abstract: Highly resistive molecular beam epitaxial GaN layers are characterized by temperature dependent conductivity and Hall effect measurements. Seven n-type GaN samples with room temperature layer resistivity ranging between 8 and 4.2×106 Ω cm are used in this study. The experimental data are analyzed by considering various transport models such as band and hopping conduction, scattering on charged dislocations and grain boundaries controlled transport. The same defect level of 0.23 eV, attributed to nitrogen vacancy, is found for layers with ρ300⩽3.7×103 Ω cm. The Hall mobility for two lower resistivity layers is influenced mainly by phonon scattering (μH∼Tx, x=−1.4). However, higher resistivity layers show positive mobility power, x=0.5–0.9, which can be explained by dominating scattering on charged dislocations. Properties of layers with the highest resistivity (1×105 and 4.2×106 Ω cm) and extremely low Hall mobility (6 and & lt;0.1 cm2 V−1 s−1) are consistent with grain boundary controlled transport. The barrier height between grains of 0.11 eV and an average grain size of 200 nm are found. Neither nearest-neighbor or variable range single phonon hopping nor multiphonon hopping can be clearly attributed to the conduction of the layers investigated.
    Type of Medium: Online Resource
    ISSN: 0021-8979 , 1089-7550
    Language: English
    Publisher: AIP Publishing
    Publication Date: 2000
    detail.hit.zdb_id: 220641-9
    detail.hit.zdb_id: 3112-4
    detail.hit.zdb_id: 1476463-5
    Location Call Number Limitation Availability
    BibTip Others were also interested in ...
  • 7
    Online Resource
    Online Resource
    American Vacuum Society ; 1985
    In:  Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena Vol. 3, No. 4 ( 1985-07-01), p. 1116-1117
    In: Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena, American Vacuum Society, Vol. 3, No. 4 ( 1985-07-01), p. 1116-1117
    Type of Medium: Online Resource
    ISSN: 0734-211X , 2327-9877
    RVK:
    Language: English
    Publisher: American Vacuum Society
    Publication Date: 1985
    detail.hit.zdb_id: 3117331-7
    detail.hit.zdb_id: 1475429-0
    Location Call Number Limitation Availability
    BibTip Others were also interested in ...
  • 8
    In: MRS Proceedings, Springer Science and Business Media LLC, Vol. 468 ( 1997)
    Abstract: In-situ cathodoluminescence (CL) is presented as a technique to optimize GaN, and AlGaN films deposited by MBE using an RF plasma as a source of reactive nitrogen. Excitation of the MBE grown nitride films is conveniently achieved in the preparation chamber using an Auger electron gun. The photoemission is monitored through a side port and dispersed with a 1/8 m monochromator with a typical resolution of 3 nm. The in-situ CL spectra of AlGaN and GaN films provides quick determination of both material composition, doping, and quality from the position and width of the band edge emission. The use of CL for the assessment of material composition in the growth of nitride materials is extremely beneficial since the complementary technique of RHEED oscillations is not routinely observed for these systems. The determination of material quality using CL has been used to optimize growth conditions for GaN PIN junction photovoltaic detectors on (0001) sapphire. Detectors having peak responsivity of 0.175 AAV at the GaN band edge of 365 nm and a UV to visible rejection ratio of greater than 10 5 have been fabricated. The high rejection ratio is accredited to the reduction of the yellow defect levels in the MBE grown material. Material optimization using in-situ CL for growth of AlGaN MODFETs having drain currents of 425 ma/mm and gm of 66 mS/mm is discussed.
    Type of Medium: Online Resource
    ISSN: 0272-9172 , 1946-4274
    Language: English
    Publisher: Springer Science and Business Media LLC
    Publication Date: 1997
    Location Call Number Limitation Availability
    BibTip Others were also interested in ...
  • 9
    Online Resource
    Online Resource
    AIP Publishing ; 2000
    In:  Applied Physics Letters Vol. 77, No. 8 ( 2000-08-21), p. 1227-1229
    In: Applied Physics Letters, AIP Publishing, Vol. 77, No. 8 ( 2000-08-21), p. 1227-1229
    Abstract: Photoelectrochemical (PEC) etching of p-type GaN has been realized in room temperature, 0.1 M KOH solutions. PEC etching of GaN was achieved by applying a positive bias to the surface of the p-GaN layer through a deposited titanium mask. The applied bias reduces the field at the semiconductor surface, which induced the dissolution of the GaN. The effect of bias on etch rate and morphology was examined. It was found that insulating the Ti mask from the KOH solution with Si3N4 significantly increases the etch rate. The rms roughness of the etched region decreased as the bias voltage increased. Etch rates as high as 4.4 nm/min were recorded for films etched at 2 V.
    Type of Medium: Online Resource
    ISSN: 0003-6951 , 1077-3118
    RVK:
    Language: English
    Publisher: AIP Publishing
    Publication Date: 2000
    detail.hit.zdb_id: 211245-0
    detail.hit.zdb_id: 1469436-0
    Location Call Number Limitation Availability
    BibTip Others were also interested in ...
Close ⊗
This website uses cookies and the analysis tool Matomo. More information can be found here...