In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 43, No. 5S ( 2004-05-01), p. 3115-
Abstract:
We show an advanced technique for measuring elastic constants C i j of thin films deposited on substrates. Thin films often show anisotropy between the in-plane and out-of-plane directions because of their columnar structure, residual stress, texture, and incohesive bond. Then, thin films show macroscopically transverse isotropy and have five independent C i j . All the film C i j affect free-vibration resonance frequencies of the film/substrate layered specimen. Therefore, measuring the resonance frequencies permits us to determine the thin-film C i j with the other known parameters. In order to yield reliable C i j of thin films, we have to measure the resonance frequencies with sufficient accuracy and identify vibration modes of the measured resonance frequencies. We overcome these problems by developing a tripod and using a laser-Doppler interferometer, respectively. We applied the present technique to a copper thin film. Measured C i j are smaller than those of bulk and show elastic anisotropy. We attribute these features to the incohesive bond regions.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.43.3115
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
2004
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7
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