In:
Journal of Materials Research, Springer Science and Business Media LLC, Vol. 23, No. 7 ( 2008-07), p. 2023-2032
Abstract:
We investigated structural and characteristic changes in thin HfO 2 films ( 〈 10 nm) by varying their thicknesses and also examined their influence on the properties of Pt/SrBi 2 Ta 2 O 9 /HfO 2 /Si metal/ferroelectric/insulator/semiconductor (MFIS) structures. HfO 2 films with different thicknesses were found to exhibit rather distinct characteristics and to profoundly affect the properties of the fabricated MFIS capacitor. We found that, when employing 3.2-nm-thick HfO 2 as the buffer layer, the MFIS capacitor showed good memory performance at low operation voltage. However, this study demonstrated that some of the HfO 2 limited its application in MFIS memory, even though it is the most promising alternative gate dielectric material.
Type of Medium:
Online Resource
ISSN:
0884-2914
,
2044-5326
DOI:
10.1557/JMR.2008.0248
Language:
English
Publisher:
Springer Science and Business Media LLC
Publication Date:
2008
detail.hit.zdb_id:
54876-5
detail.hit.zdb_id:
2015297-8
Permalink