In:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, American Vacuum Society, Vol. 22, No. 6 ( 2004-11-01), p. 3137-3142
Abstract:
Focused-ion-beam chemical vapor deposition (FIB-CVD) is an excellent technology to form three-dimensional nanostructures. Various three-dimensional nanostructures such as an inductance, a capacitor, a resistance, and a filter-circuit have been demonstrated by applying FIB-CVD with phenanthrene (C14H10) source gas using a computer-controlled pattern generator (CPG). The electrical resistivity measurement of the free-space-nanowiring was carried out by two terminal electrode method. The resistivity was 1×102Ωcm in the case of using C14H10. To reduce the electrical resistivity, tungsten hexacarbonyl [W(CO)6] is added to C14H10 as a source gas. Increasing content of W(CO)6, the electrical resistivity becomes lower from 1×102to2×10−2Ωcm at room temperature. By using free-space-nanowiring fabrication technology, the world smallest nanomechanical switch composed of a coil and a nanowiring has been fabricated and confirmed the switching operation by applying a voltage.
Type of Medium:
Online Resource
ISSN:
1071-1023
,
1520-8567
Language:
English
Publisher:
American Vacuum Society
Publication Date:
2004
detail.hit.zdb_id:
3117331-7
detail.hit.zdb_id:
3117333-0
detail.hit.zdb_id:
1475429-0
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