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  • IOP Publishing  (3)
  • Kado, Yuichi  (3)
  • Physics  (3)
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  • IOP Publishing  (3)
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  • Physics  (3)
  • 1
    In: Japanese Journal of Applied Physics, IOP Publishing, Vol. 37, No. 11R ( 1998-11-01), p. 5875-
    Abstract: A 120-kilo-gate (KG) fully functional gate-array LSI consisting of basic cells with a single-contact layout (single-contact cells) is fabricated on 300-KG sea-of-gate (SOG) type gate arrays using 0.25-µm ultra-thin-film fully-depleted (FD) complementary metal-oxide-semiconductor separation by implanted oxygen (CMOS/SIMOX) technology with selective W chemical vapor deposition (CVD). This paper shows that the performance of circuits made with single-contact cells can be as high as that with multi-contact cells, when the source/drain sheet resistance is below 5 Ω/sq. It also shows that selective W-CVD with the hydrogenation-and-hydrogen-termination (HHT) treatment can provide this sheet resistance even in ultra-thin-film silicon-on-insulator (SOI) substrates with a 50-nm-thick silicon layer. Single-contact cells built with selective W-CVD were applied to metal-oxide-semiconductor field effect transistors (MOSFETs), 2-input NAND circuits, and gate-array LSIs. Consequently, these cells did not degrade the drain current of transistors, or raise the gate delay time of the circuits. Single-contact cells built with W did not lower the yield of LSIs up to 120 KG compared to LSIs made with multi-contact cells without W. Furthermore, the 120-KG LSI consisting of single contact cells with W had no decrease in speed, compared to one with multi-contact cells. These results indicate that the selective W-CVD is a promising technology to increase the packing density of LSIs made with ultra-thin-film FD CMOS/SOI.
    Type of Medium: Online Resource
    ISSN: 0021-4922 , 1347-4065
    RVK:
    RVK:
    RVK:
    Language: Unknown
    Publisher: IOP Publishing
    Publication Date: 1998
    detail.hit.zdb_id: 218223-3
    detail.hit.zdb_id: 797294-5
    detail.hit.zdb_id: 2006801-3
    detail.hit.zdb_id: 797295-7
    Location Call Number Limitation Availability
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  • 2
    Online Resource
    Online Resource
    IOP Publishing ; 2004
    In:  Japanese Journal of Applied Physics Vol. 43, No. 8R ( 2004-08-01), p. 5209-
    In: Japanese Journal of Applied Physics, IOP Publishing, Vol. 43, No. 8R ( 2004-08-01), p. 5209-
    Abstract: Switching characteristics of digital circuits built with fully depleted (FD) silicon-on-insulator (SOI) metal–oxide–semiconductor field effect transistors (MOSFETs) are experimentally investigated. The results show that the switching speed depends on the input-signal frequency even in FD SOI digital circuits, though FD SOI MOSFETs are expected to suppress floating body effects. The switching becomes faster as the input-signal frequency decreases. This is because the body charge dynamically changes during the switching even in FD SOI MOSFETs. FD SOI MOSFETs have no neutral region in the body, while partially depleted (PD) MOSFETs do. Therefore, impact ionization plays a major role in changing the body charge in FD SOI MOSFETs, while charge redistribution does in PD SOI MOSFETs. The accumulation of majority carriers generated by impact ionization increases the body charge, and thus thereshold voltage decreases, which causes an excess drain current. This excess current is the reason for the faster switching in FD SOI digital circuits. Since the impact ionization efficiency decreases as the supply voltage decreases, the dependence of propagation delay time, t pd , on the input signal frequency can be largely reduced for FD SOI digital circuits. We also discuss several ways to efficiently decrease majority carriers accumulated in the body region and thereby minimize the dependence of t pd on the input-signal frequency for FD SOI digital circuits.
    Type of Medium: Online Resource
    ISSN: 0021-4922 , 1347-4065
    RVK:
    RVK:
    RVK:
    Language: Unknown
    Publisher: IOP Publishing
    Publication Date: 2004
    detail.hit.zdb_id: 218223-3
    detail.hit.zdb_id: 797294-5
    detail.hit.zdb_id: 2006801-3
    detail.hit.zdb_id: 797295-7
    Location Call Number Limitation Availability
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  • 3
    Online Resource
    Online Resource
    IOP Publishing ; 2004
    In:  Japanese Journal of Applied Physics Vol. 43, No. 10 ( 2004-10-8), p. 6948-6956
    In: Japanese Journal of Applied Physics, IOP Publishing, Vol. 43, No. 10 ( 2004-10-8), p. 6948-6956
    Type of Medium: Online Resource
    ISSN: 0021-4922 , 1347-4065
    RVK:
    RVK:
    RVK:
    Language: English
    Publisher: IOP Publishing
    Publication Date: 2004
    detail.hit.zdb_id: 218223-3
    detail.hit.zdb_id: 797294-5
    detail.hit.zdb_id: 2006801-3
    detail.hit.zdb_id: 797295-7
    Location Call Number Limitation Availability
    BibTip Others were also interested in ...
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