In:
SHINKU, The Vacuum Society of Japan, Vol. 33, No. 3 ( 1990), p. 307-310
Type of Medium:
Online Resource
ISSN:
0559-8516
,
1880-9413
Uniform Title:
SF6ガス凝縮層を用いたJT‐60NBI用大容量クライオソープションポンプによるHe排気
Language:
Japanese
Publisher:
The Vacuum Society of Japan
Publication Date:
1990
detail.hit.zdb_id:
2397282-8
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