In:
physica status solidi (RRL) – Rapid Research Letters, Wiley, Vol. 6, No. 1 ( 2012-01), p. 25-27
Abstract:
When a GaAs(001) substrate is heated up to 650 °C in a scanning electron microscope (SEM) vacuum chamber with vacuum range from 10 –4 Torr to 10 –5 Torr, real‐time SEM observation reveals microscale pits on GaAs substrate surface. The annealing process of GaAs substrate in vacuum causes excess evaporation of arsenic and accumulation of gallium as liquid droplets on the surface. As the function of electrochemical drills, the gallium droplets etch away GaAs beneath the surface to make microscale holes on GaAs substrate. With small amount of oxygen in the chamber acting as etching catalyst, gallium droplets etch GaAs much faster than in ultra‐high vacuum (UHV) MBE chamber. This process provides an easy technique to fabricate microscale pits on GaAs(001) surface. magnified image Top view of microscale pits, (a) 8000× magnification view of pit; (b) 15000× magnification view of pit. (© 2012 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)
Type of Medium:
Online Resource
ISSN:
1862-6254
,
1862-6270
DOI:
10.1002/pssr.201105482
Language:
English
Publisher:
Wiley
Publication Date:
2012
detail.hit.zdb_id:
2259465-6
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