In:
Journal of Micromechanics and Microengineering, IOP Publishing, Vol. 27, No. 11 ( 2017-11-01), p. 115011-
Type of Medium:
Online Resource
ISSN:
0960-1317
,
1361-6439
DOI:
10.1088/1361-6439/aa839b
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
2017
detail.hit.zdb_id:
1480280-6
detail.hit.zdb_id:
1069644-1
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