In:
International Journal of Extreme Manufacturing, IOP Publishing, Vol. 6, No. 1 ( 2024-02-01), p. 012004-
Abstract:
The existing hurdles and various techniques for polishing diamond are summarized. Laser, ion beam, plasma-assisted, and laser-assisted polishing methods are reviewed. Material removal mechanism and influencing factors of various techniques are stated. Future directions of energy beam polishing techniques for diamond are discussed. Plasma-assisted polishing is suitable to get high-quality large diamond substrates.
Type of Medium:
Online Resource
ISSN:
2631-8644
,
2631-7990
DOI:
10.1088/2631-7990/acfd67
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
2024
detail.hit.zdb_id:
2974128-2
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