Online-Ressource
Institute of Electrical and Electronics Engineers (IEEE)
;
2009
In:
Journal of Microelectromechanical Systems Vol. 18, No. 6 ( 2009-12), p. 1184-1197
In:
Journal of Microelectromechanical Systems, Institute of Electrical and Electronics Engineers (IEEE), Vol. 18, No. 6 ( 2009-12), p. 1184-1197
Materialart:
Online-Ressource
ISSN:
1057-7157
,
1941-0158
DOI:
10.1109/JMEMS.2009.2031689
Sprache:
Unbekannt
Verlag:
Institute of Electrical and Electronics Engineers (IEEE)
Publikationsdatum:
2009
ZDB Id:
2027726-X
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