In:
Microelectronic Engineering, Elsevier BV, Vol. 85, No. 10 ( 2008-10), p. 1979-1983
Type of Medium:
Online Resource
ISSN:
0167-9317
DOI:
10.1016/j.mee.2008.06.019
Language:
English
Publisher:
Elsevier BV
Publication Date:
2008
detail.hit.zdb_id:
1497065-X
detail.hit.zdb_id:
605230-7
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