In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 36, No. 7B ( 1997-07-01), p. L952-
Abstract:
The detection limits of oxygen and silicon in a SiO 2 sample were compared between a time-of-flight elastic recoil detection analysis (TOF-ERDA) and conventional ERDA using a 41.5 MeV 40 Ar ion beam. With TOF-ERDA, an energy spectrum of each mass can be extracted by measuring both the flight time and the energy of each recoil particle while conventional ERDA provides an overlapped energy spectrum fo all masses. It was found that the oxygen can be detected at areal densities of as low as 6.62×10 13 atoms/cm 2 by TOF-ERDA, and that the detection limits can be improved by the factor of 5 compared to conventional ERDA.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.36.L952
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
1997
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7
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