In:
Nanomaterials, MDPI AG, Vol. 12, No. 15 ( 2022-08-08), p. 2722-
Abstract:
Multi-component nitride thin films usually show high hardness and good wear resistance due to the nanoscale structure and solid-solution strengthening effect. However, the state of N atoms in the thin film and its effects on the compressive strength is still unclear. In this work, (AlTiVCr)N multi-component nitride thin films with a face-centered cubic (FCC) structure prepared by the direct current magnetron sputtering method exhibit a superior strength of ~4.5 GPa and final fracture at a strain of ~5.0%. The excellent mechanical properties are attributed to the synergistic effects of the nanocrystalline structure, covalent bonding between N and metal atoms, and interstitial strengthening. Our results could provide an intensive understanding of the relationship between microstructure and mechanical performances for multi-component nitride thin films, which may promote their applications in micro- and nano-devices.
Type of Medium:
Online Resource
ISSN:
2079-4991
DOI:
10.3390/nano12152722
Language:
English
Publisher:
MDPI AG
Publication Date:
2022
detail.hit.zdb_id:
2662255-5
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