In:
Journal of Micromechanics and Microengineering, IOP Publishing, Vol. 11, No. 2 ( 2001-03-01), p. 146-152
Type of Medium:
Online Resource
ISSN:
0960-1317
,
1361-6439
DOI:
10.1088/0960-1317/11/2/310
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
2001
detail.hit.zdb_id:
1480280-6
detail.hit.zdb_id:
1069644-1
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