In:
Applied Physics Letters, AIP Publishing, Vol. 116, No. 12 ( 2020-03-23)
Abstract:
A nano-patterning process is reported in this work, which can achieve surface acoustic wave (SAW) devices with an extremely high frequency and a super-high mass sensitivity. An integrated lift-off process with ion beam milling is used to minimize the short-circuiting problem and improve the quality of nanoscale interdigital transducers (IDTs). A specifically designed proximity-effect-correction algorithm is applied to mitigate the proximity effect occurring in the electron-beam lithography process. The IDTs with a period of 160 nm and a finger width of 35 nm are achieved, enabling a frequency of ∼30 GHz on lithium niobate based SAW devices. Both centrosymmetric type and axisymmetric type IDT structures are fabricated, and the results show that the centrosymmetric type tends to excite lower-order Rayleigh waves and the axisymmetric type tends to excite higher-order wave modes. A mass sensitivity of ∼388.2 MHz × mm2/μg is demonstrated, which is ∼109 times larger than that of a conventional quartz crystal balance and ∼50 times higher than a conventional SAW device with a wavelength of 4 μm.
Type of Medium:
Online Resource
ISSN:
0003-6951
,
1077-3118
Language:
English
Publisher:
AIP Publishing
Publication Date:
2020
detail.hit.zdb_id:
211245-0
detail.hit.zdb_id:
1469436-0
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