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  • 1
    Online Resource
    Online Resource
    INVESTIGATION OF COUPLED EFFECTS OF TEMPERATURE AND RELATIVE HUMIDITY ON DYNAMIC PERFORMANCE OF MEMS CANTILEVER RESONATORS IN GAS RAREFACTION
    Publishing House for Science and Technology, Vietnam Academy of Science and Technology (Publications) ; 2019
    In:  Vietnam Journal of Science and Technology Vol. 57, No. 3 ( 2019-06-04), p. 366-
    Details
    In: Vietnam Journal of Science and Technology, Publishing House for Science and Technology, Vietnam Academy of Science and Technology (Publications), Vol. 57, No. 3 ( 2019-06-04), p. 366-
    Abstract: The modified molecular gas lubrication (MMGL) equation with the effective viscosity of moist air is utilized to solve for the squeeze film damping (SFD) problem on the dynamic performance of MEMS cantilever resonators. Thus, the coupled effects of temperature and relative humidity are discussed on the Q-factors of MEMS cantilever resonators in a wide range of gas rarefaction (pressure, p and accommodation coefficients, ACs) and resonant mode of vibration. The results showed that the Q-factor of moist air decreases more significantly as temperature and relative humidity increase at higher gas rarefaction (lower p, and ACs) conditions.  
    Type of Medium: Online Resource
    ISSN: 2525-2518 , 2525-2518
    URL: Article
    DOI: 10.15625/2525-2518/57/3/13123
    Language: Unknown
    Publisher: Publishing House for Science and Technology, Vietnam Academy of Science and Technology (Publications)
    Publication Date: 2019
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    Online Resource
  • 2
    Online Resource
    Online Resource
    INVESTIGATION ON EFFECT OF SURFACE ROUGHNESS PATTERN TO DYNAMIC PERFORMANCE OF MEMS RESONATORS IN VARIOUS TYPES OF GASES AND GAS RAREFACTION
    Publishing House for Science and Technology, Vietnam Academy of Science and Technology (Publications) ; 2021
    In:  Vietnam Journal of Science and Technology Vol. 59, No. 5 ( 2021-10-26)
    Details
    In: Vietnam Journal of Science and Technology, Publishing House for Science and Technology, Vietnam Academy of Science and Technology (Publications), Vol. 59, No. 5 ( 2021-10-26)
    Abstract: The average modified molecular gas lubrication (MMGL) equation, which is modified with pressure flow factors and effective viscosity, is utilized to analyze the squeeze film damping (SFD) on micro-beam resonators considering effect of surface roughness pattern in various types of gases and gas rarefaction. Then, effect of surface roughness pattern (film thickness ratio and Peklenik number) is discussed on the quality factor (Q-factor) of micro-beam resonators in various types of gases and gas rarefaction. Thus, effect of surface roughness pattern is significantly reduced as effective viscosity of gas decreases in higher mode of resonator and higher gas rarefaction.
    Type of Medium: Online Resource
    ISSN: 2525-2518 , 2525-2518
    URL: Article
    DOI: 10.15625/2525-2518/59/5/15478
    Language: Unknown
    Publisher: Publishing House for Science and Technology, Vietnam Academy of Science and Technology (Publications)
    Publication Date: 2021
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  • 3
    Online Resource
    Online Resource
    SIMULATION AND ANALYSIS OF A NOVEL MICRO-BEAM TYPE OF MEMS STRAIN SENSORS
    Publishing House for Science and Technology, Vietnam Academy of Science and Technology (Publications) ; 2019
    In:  Vietnam Journal of Science and Technology Vol. 57, No. 6 ( 2019-11-20), p. 762-
    Details
    In: Vietnam Journal of Science and Technology, Publishing House for Science and Technology, Vietnam Academy of Science and Technology (Publications), Vol. 57, No. 6 ( 2019-11-20), p. 762-
    Abstract: A new structure of a micro-strain beam type of Micro-Electro-Mechanical-Systems (MEMS) strain gauge is proposed and simulated. The stress and strain distributions of MEMS strain gauge are evaluated in x and y directions by 2D FEM simulation, respectively. The results showed that the longitudinal stress and strain distributions of strain beam enhance significantly, while the transverse stress and strain distributions are almost unchanged in the whole structure of MEMS strain gauge. High sensitivity of piezoresistive MEMS strain sensors can be designed to detect only one single direction of the stress and strain on the material objects.
    Type of Medium: Online Resource
    ISSN: 2525-2518 , 2525-2518
    URL: Article
    DOI: 10.15625/2525-2518/57/6/13905
    Language: Unknown
    Publisher: Publishing House for Science and Technology, Vietnam Academy of Science and Technology (Publications)
    Publication Date: 2019
    Location Call Number Limitation Availability
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    Online Resource
  • 4
    Online Resource
    Online Resource
    Effects of temperature and relative humidity on resonant frequency of mems cantilever resonators under atmospheric pressure
    Publishing House for Science and Technology, Vietnam Academy of Science and Technology (Publications) ; 2022
    In:  Vietnam Journal of Science and Technology Vol. 60, No. 4 ( 2022-08-31), p. 726-738
    Details
    In: Vietnam Journal of Science and Technology, Publishing House for Science and Technology, Vietnam Academy of Science and Technology (Publications), Vol. 60, No. 4 ( 2022-08-31), p. 726-738
    Abstract: In this study, the effects of temperature and relative humidity on the resonant frequency of a micro-electro-mechanical system (MEMS) cantilever resonator under atmospheric pressure (p=101325 Pa) are discussed. The squeeze film damping (SFD) problem of MEMS cantilever resonators is modeled by solving the modified molecular gas lubrication (MMGL) equation, the equation of motion of micro-cantilever, and their appropriate boundary conditions, simultaneously in the eigen-value problem. The effective viscosity (µeff(RH, T)) of moist air is utilized to modify the MMGL equation to consider the effects of temperature and relative humidity under atmospheric pressure. Thus, the effects of temperature (T) and relative humidity (RH) on the resonant frequency of MEMS cantilever resonators over a wide range of gap thicknesses and under atmospheric pressure are discussed. The results showed that the frequency shift increases as the relative humidity and temperature increase. The influence of relative humidity on the resonant frequency becomes more significant under conditions of higher temperature and smaller gap thickness.
    Type of Medium: Online Resource
    ISSN: 2815-5874 , 2525-2518
    URL: Article
    DOI: 10.15625/2525-2518/16347
    Language: Unknown
    Publisher: Publishing House for Science and Technology, Vietnam Academy of Science and Technology (Publications)
    Publication Date: 2022
    Location Call Number Limitation Availability
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    Online Resource
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