In:
Journal of Applied Physics, AIP Publishing, Vol. 66, No. 10 ( 1989-11-15), p. 5099-5101
Abstract:
Metalorganic chemical vapor deposition (MOCVD) of YBa2Cu3O7−x films on (100) SrTiO3 was performed in a high-speed rotating disk reactor. Metal β-diketonates were used as source materials. Energy dispersive spectroscopy analysis showed as-grown and post-annealed samples to have a composition matching that of superconducting thin-film standards. X-ray data showed the annealed films to be highly oriented with the c axis perpendicular to the substrate. The best films exhibited an onset temperature of 90 K and zero resistance at 88 K. The width of the superconductive transition ( & lt;2 K) is the best value thus far reported for 123 films grown in a commercially available MOCVD system.
Type of Medium:
Online Resource
ISSN:
0021-8979
,
1089-7550
Language:
English
Publisher:
AIP Publishing
Publication Date:
1989
detail.hit.zdb_id:
220641-9
detail.hit.zdb_id:
3112-4
detail.hit.zdb_id:
1476463-5
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