In:
physica status solidi c, Wiley, Vol. 4, No. 12 ( 2007-12), p. 4400-4403
Abstract:
Nitrogenated tetrahedral carbon films were prepared by filtered cathodic arc deposition. Raman spectroscopy analysis shows N incorporation increases the clustering of the sp 2 phase, Nanoindentaion shows the hardness reduction caused by N incorporation can be compensated by optimization of C ion energy in the deposition. Ta‐C:N films shows higher extinction coefficient and less transparency. The good morphology of films implies ta‐C:N overcoat has good coverage on magnetic head. Corrosion experiment reveals ta‐C:N overcoat has better anti‐corrosion performance. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)
Type of Medium:
Online Resource
ISSN:
1862-6351
,
1610-1642
DOI:
10.1002/pssc.200777146
Language:
English
Publisher:
Wiley
Publication Date:
2007
detail.hit.zdb_id:
2105580-4
detail.hit.zdb_id:
2102966-0
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