In:
Advanced Materials Technologies, Wiley, Vol. 8, No. 1 ( 2023-01)
Abstract:
Fabricating high‐quality thin films on a 3D structured polymer substrate is crucial in realizing high‐performance flexible electronics. Herein, simple yet effective twofold strategies are demonstrated to directly fabricate flexible thin film capacitors on polymer substrate: the crystallization of high‐ k TiO 2 film by plasma‐assisted atomic layer annealing at low temperature (80 °C) on nanostructured polycarbonate (PC) substrates fabricated by simple dynamic nanoinscribing (DNI) technique. Plasma‐induced amorphous‐to‐anatase phase transformation occurs in PEALD TiO 2 /ZrO 2 bilayer thin films, resulting in the capacitance density increase by 30%. The DNI patterning of PC substrates in two directions further increases the surface area by 35% and the capacitance density by 37%, leading to the flexible capacitor of a record‐high capacitance density (24.2 nF mm −2 ) with mechanical stability.
Type of Medium:
Online Resource
ISSN:
2365-709X
,
2365-709X
DOI:
10.1002/admt.202201134
Language:
English
Publisher:
Wiley
Publication Date:
2023
detail.hit.zdb_id:
2850995-X
Permalink