In:
ECS Journal of Solid State Science and Technology, The Electrochemical Society, Vol. 12, No. 7 ( 2023-07-01), p. 074010-
Kurzfassung:
Two-step cyclic etching of copper thin films using acetylacetone/O 2 gases was developed. Surface modification step and removal step of modified layer were optimized. EDX and XPS analyses confirmed the formation of the copper compounds such as CuO x , Cu(OH) 2 , and organic layer containing carbonyl group. Good etch profile of copper thin films by two-step cyclic etching was achieved.
Materialart:
Online-Ressource
ISSN:
2162-8769
,
2162-8777
DOI:
10.1149/2162-8777/ace795
Sprache:
Unbekannt
Verlag:
The Electrochemical Society
Publikationsdatum:
2023
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