In:
Microsystem Technologies, Springer Science and Business Media LLC, Vol. 25, No. 8 ( 2019-8), p. 3017-3026
Type of Medium:
Online Resource
ISSN:
0946-7076
,
1432-1858
DOI:
10.1007/s00542-018-4179-5
Language:
English
Publisher:
Springer Science and Business Media LLC
Publication Date:
2019
detail.hit.zdb_id:
1476561-5
detail.hit.zdb_id:
1223008-X
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