In:
Advanced Materials Research, Trans Tech Publications, Ltd., Vol. 986-987 ( 2014-7), p. 42-46
Abstract:
Transmission spectrum and reflectance spectrum have long been used to characterize gap semiconductor. Transmission spectrum can be measured very directly, but the influence of substrate absorption is often unavoidable. However, when using the reflectance spectrum measurement, the absorption of thin film, substrate absorption, and coherent interference will make the reflectance spectrum much more complicated. In this paper, Considering the absorption of thin film, substrate absorption, and coherent interference, we use the envelope curves algorithm to achieve the calculation formula of refractive index deduced from the reflectance spectrum. Through the analysis of the reflectance spectrum of Ga 2 O 3 film, we achieved thickness of the film, refractive index, extinction and absorption coefficient and dispersion constant.
Type of Medium:
Online Resource
ISSN:
1662-8985
DOI:
10.4028/www.scientific.net/AMR.986-987
DOI:
10.4028/www.scientific.net/AMR.986-987.42
Language:
Unknown
Publisher:
Trans Tech Publications, Ltd.
Publication Date:
2014
detail.hit.zdb_id:
2265002-7
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