In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 31, No. 2S ( 1992-02-01), p. 611-
Abstract:
A scanning tunneling microscope (STM) was used to observe the surface profile of an optical disk and to quantitatively evaluate the lithography conditions in the mastering process. A high-density and high-carrier-to-noise-ratio (C/N) optical disk was achieved using precise data concerned with the relations among the mastering process, the profile of the masters, and the readout signal.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
1992
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7
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