In:
Chinese Journal of Liquid Crystals and Displays, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Vol. 33, No. 9 ( 2018), p. 717-724
Type of Medium:
Online Resource
ISSN:
1007-2780
Uniform Title:
阵列基板栅极制程的Cu腐蚀研究
DOI:
10.3788/YJYXS/2018/33/9
DOI:
10.3788/YJYXS20183309.0717
Language:
English
,
Chinese
Publisher:
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences
Publication Date:
2018
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