In:
Chinese Journal of Liquid Crystals and Displays, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Vol. 29, No. 5 ( 2014), p. 674-680
Type of Medium:
Online Resource
ISSN:
1007-2780
Uniform Title:
过孔刻蚀工艺优化对过孔尺寸减小的研究
DOI:
10.3788/YJYXS/2014/29/5
DOI:
10.3788/YJYXS20142905.0674
Language:
English
,
Chinese
Publisher:
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences
Publication Date:
2014
Permalink