In:
Optics and Precision Engineering, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Vol. 19, No. 11 ( 2011), p. 2636-2643
Type of Medium:
Online Resource
ISSN:
1004-924X
Uniform Title:
快速大面积测量用原子力显微镜扫描速度对测量结果的影响
DOI:
10.3788/OPE./2011/19/11
DOI:
10.3788/OPE.20111911.2636
Language:
English
,
Chinese
Publisher:
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences
Publication Date:
2011
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