In:
ACTA PHOTONICA SINICA, Shanghai Institute of Optics and Fine Mechanics, Vol. 51, No. 9 ( 2022), p. 0912001-
Type of Medium:
Online Resource
ISSN:
1004-4213
Uniform Title:
Signal Processing for Height Measurement of High-aspect-ratio Structure Based on Low-coherence Interferometry
DOI:
10.3788/gzxb/2022/51/9
DOI:
10.3788/gzxb20225109.0912001
Language:
English
,
Chinese
Publisher:
Shanghai Institute of Optics and Fine Mechanics
Publication Date:
2022
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